72Ge in the form of Germanium Tetrafluoride Gas for Semiconductor Manufacture
Enriched Germanium Tetrafluoride gas is a novel silicon wafer dopant for the production of highly integrated, high-density microchips. 72GeF4 provides for greater efficiency and increased production throughput, and helps to make chips smaller and better
|Material||72Ge in form of Germanium Tetrafluoride Electronic Grade|
|Enrichment||72Ge ≙ 50 – 53 at%
72Ge ≙ 55 – 58 at%
|Purity||> 99,9 wt%|
Impurities in vppm
* Our gas is fully compatible with VLIS-requirements.